|Title||Robust, common path, phase shifting interferometer and optical profilometer.|
|Publication Type||Journal Article|
|Year of Publication||2008|
|Authors||R Tumbar, DL Marks, and DJ Brady|
|Pagination||B32 - B43|
We describe an improved implementation of our previously reported common-path, phase shifting, and shearing interferometer. Using a time-multiplexed phase shifting scheme, we demonstrate higher sampling resolution, better light sensitivity, and use of arbitrary phase shifting algorithms. We describe microscopic imaging of the surface profile of a copper-plated silicon wafer and demonstrate that the system is vibration insensitive with approximately lambda/100 repeatability. In a more general discussion of our method, we describe the different functional elements and suggest alternative designs and improvements. Possible uses include full-field coherent imaging and high dynamic range wavefront sensing, which we briefly discuss.
|Short Title||Applied Optics|