Fabrication of thin-film micropolarizer arrays for visible imaging polarimetry

TitleFabrication of thin-film micropolarizer arrays for visible imaging polarimetry
Publication TypeJournal Article
Year of Publication2000
AuthorsJ Guo, and D Brady
JournalApplied Optics
Volume39
Start Page1486
Issue10
Pagination1486 - 1492
Date Published04/2000
Abstract

We describe a microfabrication process for fabricating micropolarizer devices with polarization thin film. The polarization film is less than a 0.5 µm thick and can have a polarization extinction ratio of ∼330 in the visible wavelength range. A single-state micropolarizer array with polarizing pixels as small as 5 µm × 5 µm has been fabricated. A multilayer spatially multiplexed three-state micropolarizer line array with a 14.4-µm resolution has also been fabricated for visible imaging polarimetry application. © 2000 Optical Society of America.

DOI10.1364/AO.39.001486
Short TitleApplied Optics